Name: Oil-lubricated molecular pump
Brand: SAWA VACUUM
Availability: InStock
Rating: 5 (1 reviews)

Performance Parameter:

Inlet Flange	DN100 CF / DN100 ISO-K	Exhaust Flange (ISO-KF)	DN25
Pumping Speed (L/s)	N₂:150, He:100, H₂:50, Ar:130	Compression Ratio	N₂:1E6, He:1E2, H₂:5E2, Ar:1E6
Ultimate Pressure (Pa)	CF: 6E-7 / ISO-K: 6E-6	Maximum Continuous Operating Pressure (Pa)	200
Maximum Operating Pressure (Pa)	N₂:300	Maximum Gas Flow (sccm)	N₂:300, He:240, H₂:180, Ar:110
Rated Rotation Speed (RPM)	42300	Startup Time (min)	≤3
Cooling Method	Water or Air Cooling (Air cooling optional when ambient temperature ≤32℃)	Cooling Water Flow Rate (L/min)	≥1
Cooling Water Temperature (℃)	≤25	Power Supply Voltage (V AC/DC)	DC24/AC220
Maximum Power (W)	≤300	Matching Power Supply Model	FD-110A
Recommended Foreline Pumping Speed (L/s)	2	Weight (kg)	8

Performance Parameter:

Inlet Flange	DN160 CF / DN160 ISO-K	Exhaust Flange (ISO-KF)	DN40
Pumping Speed (L/s)	N₂:600, He:380, H₂:240, Ar:580	Compression Ratio	N₂:1E9, He:1E4, H₂:6E3, Ar:1E9
Ultimate Pressure (Pa)	CF: 6E-7 / ISO-K: 6E-6	Maximum Continuous Operating Pressure (Pa)	240
Maximum Operating Pressure (Pa)	N₂:350	Maximum Gas Flow (sccm)	N₂:1200, He:880, H₂:700, Ar:450
Rated Rotation Speed (RPM)	27000	Startup Time (min)	≤7
Cooling Method	Water Cooling	Cooling Water Flow Rate (L/min)	≥1
Cooling Water Temperature (℃)	≤25	Power Supply Voltage (V AC/DC)	DC24/AC220
Maximum Power (W)	≤500	Matching Power Supply Model	TCDP-II, FD-IIB, TD-II/TCP-II
Recommended Foreline Pumping Speed (L/s)	4–8	Weight (kg)	29 (LF) / 30.5 (CF)

Performance Parameter:

Inlet Flange	DN200 CF / DN200 ISO-K	Exhaust Flange (ISO-KF)	DN40
Pumping Speed (L/s)	N₂:1200, He:750, H₂:480, Ar:1160	Compression Ratio	N₂:1E9, He:1E4, H₂:6E3, Ar:1E9
Ultimate Pressure (Pa)	CF: 6E-7 / ISO-K: 6E-6	Maximum Continuous Operating Pressure (Pa)	400
Maximum Operating Pressure (Pa)	N₂:500	Maximum Gas Flow (sccm)	N₂:2300, He:1700, H₂:1350, Ar:870
Rated Rotation Speed (RPM)	24000	Startup Time (min)	≤9
Cooling Method	Water Cooling	Cooling Water Flow Rate (L/min)	≥1
Cooling Water Temperature (℃)	≤25	Power Supply Voltage (V AC/DC)	DC24/AC220
Maximum Power (W)	≤750	Matching Power Supply Model	TCDP-II, FD-IIB, TD-II/TCP-II
Recommended Foreline Pumping Speed (L/s)	15	Weight (kg)	39 (LF) / 41 (CF)

Performance Parameter:

Inlet Flange	DN250 CF / DN250 ISO-K	Exhaust Flange (ISO-KF)	DN50
Pumping Speed (L/s)	N₂:1500, He:1100, H₂:550, Ar:1350	Compression Ratio	N₂:1E8, He:1E4, H₂:5E3, Ar:1E8
Ultimate Pressure (Pa)	CF: 6E-7 / ISO-K: 6E-6	Maximum Continuous Operating Pressure (Pa)	300
Maximum Operating Pressure (Pa)	N₂:450	Maximum Gas Flow (sccm)	N₂:2400, He:1800, H₂:1400, Ar:900
Rated Rotation Speed (RPM)	21000	Startup Time (min)	≤8
Cooling Method	Water Cooling	Cooling Water Flow Rate (L/min)	≥1
Cooling Water Temperature (℃)	≤25	Power Supply Voltage (V AC/DC)	DC24/AC220
Maximum Power (W)	≤750	Matching Power Supply Model	FD-II, FD-IIB, TCDP-II, TD-II
Recommended Foreline Pumping Speed (L/s)	15	Weight (kg)	60 (LF) / 63 (CF)

Performance Parameter:

Inlet Flange	DN250 CF / DN250 ISO-K	Exhaust Flange (ISO-KF)	DN50
Pumping Speed (L/s)	N₂:1600, He:1550, H₂:1000, Ar:640	Compression Ratio	N₂:1E8, H₂:5E3
Ultimate Pressure (Pa)	CF: 6E-7 / ISO-K: 6E-6	Maximum Continuous Operating Pressure (Pa)	200
Maximum Operating Pressure (Pa)	N₂:650	Maximum Gas Flow (sccm)	N₂:2500, He:1850, H₂:1450, Ar:950
Rated Rotation Speed (RPM)	24000	Startup Time (min)	≤9
Cooling Method	Water Cooling	Cooling Water Flow Rate (L/min)	≥1
Cooling Water Temperature (℃)	≤25	Power Supply Voltage (V AC/DC)	DC24/AC220
Maximum Power (W)	≤750	Matching Power Supply Model	TCDP-II, FD-IIB, TD-II/TCP-II
Recommended Foreline Pumping Speed (L/s)	15	Weight (kg)	47 (LF) / 50 (CF)

Performance Parameter:

Inlet Flange	DN400 ISO-K	Exhaust Flange (ISO-KF)	DN100
Pumping Speed (L/s)	N₂:3500, He:2750, H₂:1300, Ar:3300	Compression Ratio	N₂:1E8, He:1E3, H₂:5E2, Ar:1E8
Ultimate Pressure (Pa)	2E-6	Maximum Continuous Operating Pressure (Pa)	100
Maximum Operating Pressure (Pa)	N₂:300	Maximum Gas Flow (sccm)	N₂:5500, He:4000, H₂:3200, Ar:2100
Rated Rotation Speed (RPM)	13500	Startup Time (min)	≤18
Cooling Method	Water Cooling	Cooling Water Flow Rate (L/min)	≥1
Cooling Water Temperature (℃)	≤25	Power Supply Voltage (V AC/DC)	DC24/AC220
Maximum Power (W)	≤1100	Matching Power Supply Model	FD-III, TCDP-III
Recommended Foreline Pumping Speed (L/s)	30	Weight (kg)	130

Performance Parameter:

Inlet Flange	DN400 ISO-K	Exhaust Flange (ISO-KF)	DN100 ISO-K
Pumping Speed (L/s)	N₂:4500, He:3200, H₂:2000, Ar:4200	Compression Ratio	N₂:5E7, He:1E3, H₂:5E2, Ar:5E7
Ultimate Pressure (Pa)	2E-6	Maximum Continuous Operating Pressure (Pa)	100
Maximum Operating Pressure (Pa)	N₂:300	Maximum Gas Flow (sccm)	N₂:5500, He:4000, H₂:3200, Ar:2100
Rated Rotation Speed (RPM)	15300	Startup Time (min)	≤10
Cooling Method	Water Cooling	Cooling Water Flow Rate (L/min)	≥1
Cooling Water Temperature (℃)	≤25	Power Supply Voltage (V AC/DC)	DC24/AC220
Maximum Power (W)	≤1100	Matching Power Supply Model	FD-III
Recommended Foreline Pumping Speed (L/s)	30	Weight (kg)	118

Performance Parameter:

Inlet Flange	DN400 ISO-F	Exhaust Flange (ISO-KF)	DN40
Pumping Speed (L/s)	N₂:5000, He:3550, H₂:2500, Ar:4500	Compression Ratio	N₂:1E8, He:1E4, H₂:1E3, Ar:1E8
Ultimate Pressure (Pa)	1E-7	Maximum Continuous Operating Pressure (Pa)	100
Maximum Operating Pressure (Pa)	N₂:300	Maximum Gas Flow (sccm)	N₂:5500, He:4000, H₂:3200, Ar:2100
Rated Rotation Speed (RPM)	21000	Startup Time (min)	≤15
Cooling Method	Water Cooling	Cooling Water Flow Rate (L/min)	≥1
Cooling Water Temperature (℃)	≤25	Power Supply Voltage (V AC/DC)	DC24/AC220
Maximum Power (W)	≤1100	Matching Power Supply Model	CDP-IV
Recommended Foreline Pumping Speed (L/s)	30	Weight (kg)	98 (split type) / 110 (integrated type)

Oil-lubricated molecular pump

Description