High-performance semiconductor-grade vacuum pump

Suitable for medium-to-heavy-duty processes such as ETCH, PVD, CVD, and DIFF, it features high pumping speed, high efficiency, low noise, long lifespan, and easy maintenance. The self-developed water-cooled motor, equipped with a fully automatic frequency converter drive, maximizes torque output to meet demanding process requirements. The water-cooled, integrally sealed motor design eliminates the risk of oil leakage. The intelligent control system allows for one-button start/stop via a panel button using intelligent programming. It automatically performs pump chamber purging during shutdown and enables remote control and monitoring via external I/O interface and RS485 (Modbus protocol). A TEFLON anti-corrosion coating enhances corrosion resistance, making it suitable for demanding processes.

Applicable industries: New energy photovoltaics, semiconductors, lithium batteries, panels, research institutes